Structural and mechanical properties of a-C:H and Si doped a-C:H thin films grown by LF-PECVD

C. Chouquet, Guillaume Gerbaud, Michel Bardet, Silvère Barrat, Alain Billard, Frédéric Sanchette, C. Ducros

Surface and Coatings Technology · 2009 · 48 citations · 22 references

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