Concepedia

A novel method for thickness profile control in RF PECVD deposition on large area substrates

Y. Yin, L. Hang, M. Proschek, David R. McKenzie, Marcela Bilek

Surface and Coatings Technology · 2005 · 11 citations · 8 references

DOI

Concepts

References

8

Standing wave and skin effects in large-area, high-frequency capacitive discharges

M. A. Lieberman, Jean‐Paul Booth, Pascal Chabert et al. · Plasma Sources Science and Technology · 2002 · 359 citations

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Applications of the cavity ring-down technique to a large-area rf-plasma reactor

F. Grangeon, Clothilde Monard, A.A. Howling et al. · Plasma Sources Science and Technology · 1999 · 47 citations · Full text

, , +13

Circularly Wedged Optical Coatings I Theory

Alfred Thelen · Applied Optics · 1965 · 22 citations

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Helicon plasma with additional immersed antenna

Ane Aanesland, Christine Charles, R. W. Boswell et al. · Journal of Physics D Applied Physics · 2004 · 15 citations

, , +14

Sputtering effects in a helicon plasma with an additional immersed antenna

Ane Aanesland, Christine Charles, Rod Boswell et al. · Plasma Sources Science and Technology · 2003 · 13 citations

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