Undistorted 3D microstructures in SU8 formed through two-photon polymerization

Abstract

This paper presents the wavelength dependence of two-photon polymerization in SU-8 between 720-780 nm. The study is performed by microstructuring SU-8 through a single-shot exposure of SU-8 to 140 fs tunable laser pulses with 80 MHz repetition rate, or by laser direct writing. Two-photon absorption is closely related to one-photon absorption in pristine SU-8. By careful design of the neighboring micro-structures, or by varying wet-processing parameters during development, undistorted and unbended 3D micro-structures have been fabricated through direct laser writing.