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Chemical vapour deposition of silicon under reduced pressure in a hot-wall reactor: Equilibrium and kinetics

Chemical EngineeringReduced PressureEngineeringHot-wall ReactorSurface ScienceApplied PhysicsThermodynamicsHeat TransferChemical VapourChemical DepositionThermal EngineeringChemical KineticsChemical Vapor DepositionSilicon On Insulator