Some limitations of surface profile reconstruction in scanning electron microscopy

Abstract

Abstract This paper is a contribution to development of electron beam profilography based on the so called “shape from shading” technique. A new formula of signal processing in a two detector system has been proposed. The formula en be applied to all the signals showing Lambert's angular distribution. The signal processing may be realized in “real time” in a simple analog processing system. However, an accuracy of the profiles is limited by numerous errors, mainly by shadowing effects. As the shadowing causes disturbances of the signal flow, a proper design of the detection system is necessary to reduce the errors.