Rotating cryogenic drum supplying solid Xe target to generate extreme ultraviolet radiation

Abstract

In order to generate high-average-power extreme ultraviolet radiation around 13.5nm from laser-produced plasma, a fast rotating cryogenic drum system which can continuously supply a solid Xe target for high-repetition laser pulses has been developed. It was successfully operated at a rotating speed of 1000rpm and an up-down speed of 3mm∕s. The growth rate of the solid Xe layer is kept at a constant speed (for example, 18μm∕s) with a constant rate of Xe input flow, independent of the rotating speed. It has been demonstrated that wipers play an important role in recovering the laser craters with a recovery rate of 150μm∕s. These performances allow laser illuminations on the solid Xe target with a pulse repetition rate of 10kHz without overlapping laser craters.