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Superhydrophobic silicon surfaces with micro–nano hierarchical structures via deep reactive ion etching and galvanic etching

Materials ScienceEngineeringNanomaterialsNanotechnologyNanostructured SurfaceSurface ScienceApplied PhysicsSuperhydrophobic Silicon SurfacesSuper-hydrophobic SurfaceSurface NanotechnologyGalvanic EtchingMicro–nano Hierarchical Structures