Silicon photonic waveguides for different wavelength regions

Abstract

In this paper, we present our work on three silicon waveguide structures that are suitable for three different wavelength regions: near-, mid- and far-infrared. Design rules for standard rib SOI waveguides are given. Both single mode and polarization independence in these waveguides are discussed. A hollow-core waveguide suitable for gas-sensing applications in the mid-infrared wavelength region is also analysed. Finally, fabrication and experimental results for free standing waveguides, which may find application in the mid- and perhaps far-infrared wavelength regions, are presented.<br/>