Concepedia

Electrochemical impedance spectroscopy as a probe for wet chemical silicon oxide characterization

Valérie Bertagna, René Erre, François Rouelle, S. Petitdidier, M. Chemla

Journal of Solid State Electrochemistry · 2001 · 20 citations · 0 references

Concepts

Natural SciencesChemistryMaterials ScienceElectrochemistryInterface ScienceSurface ChemistryElectrical CharacterizationElectroanalytical ChemistryElectrochemical Impedance SpectroscopyElectrochemical SensorsImpedance SpectroscopySemiconductor InterfacesElectrochemical Impedance AnalysisElectrochemical Impedance MonitoringIn Situ Impedance MeasurementsSemiconductor Impedance SpectroscopySilicon Interfaces