Japanese Journal of Applied Physics · 2011 · 39 citations · 25 references
Natural SciencesMaterials EngineeringMaterials ScienceMaterials ChemistrySemiconductor MaterialsThin FilmsMetal SulfidesSulfur ChemistrySulfur CompoundsThermal Properties Of SemiconductorsThin Film AnnealingAnnealing Temperature EffectsGrain Size ImprovementMetal Sulfide Thin FilmsPhase Behavior Of Metal SulfidesRapid Thermal AnnealingTemperature DependenceTransition Metal SulfidesZinc Sulfides
Cu 2 ZnSnS 4 (CZTS) thin films were fabricated by a sol–gel sulfurization method with a rapid thermal process. The films preheated at 250 °C for 1 h and sulfurized from 350 to 600 °C for 1 h were investigated. The chemical composition of sulfur was 40% for the preheated film and 50% for the films sulfurized at temperatures higher than 400 °C. The grain size of the films markedly increased with increasing sulfurization temperature from 400 to 450 °C and that of the films sulfurized at temperatures higher than 450 °C was ∼2 µm. The preheated film and the films sulfurized at temperatures lower than 400 °C were composed of Cu x S and CZTS. The Cu x S phase was eliminated from the CZTS films by sulfurization at temperatures higher than 500 °C.
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