An in situ infrared study of the room temperature oxidation of silicon with atomic and molecular oxygen - Concepedia

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An in situ infrared study of the room temperature oxidation of silicon with atomic and molecular oxygen

16

Citations

5

References

1989

Year

W.C.M. Claassen, R. Schmitz, J. Dieleman

Applied Surface Science

EngineeringRoom Temperature OxidationOxidation ResistanceSurface ScienceMolecular OxygenApplied PhysicsChemistrySilicon On InsulatorSilicon Debugging

References

	Year	Citations

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