Real-time stress evolution during early growth stages of sputter-deposited metal films: Influence of adatom mobility - Concepedia

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Real-time stress evolution during early growth stages of sputter-deposited metal films: Influence of adatom mobility

55

Citations

26

References

2013

Year

G. Abadias, A. Fillon, Jonathan Colin, A. Michel, C. Jaouen

Materials ScienceMaterials EngineeringMaterial AnalysisEngineeringPhysicsSurface ScienceApplied PhysicsReal-time Stress EvolutionEarly Growth StagesThin FilmsChemical DepositionEpitaxial GrowthAdatom MobilityThin Film ProcessingMicrostructure

References

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