AIP Advances · 2014 · 45 citations · 13 references
EngineeringElectrical EngineeringMechatronics EngineeringCircuit TheoryMicroelectromechanical SystemsSensorsCapacitive SensingDevice ModelingMems ModelingProximity SensorsCapacitanceCapacitance EstimationCapacitive Proximity SensingCapacitive Sensor ModelingCapacitive SensorsEngineering Design ProcessPhysical Models
A semi-analytical model for a double-plate capacitive proximity sensor is presented according to the effective theory. Three physical models are established to derive the final equation of the sensor. Measured data are used to determine the coefficients. The final equation is verified by using measured data. The average relative error of the calculated and the measured sensor capacitance is less than 7.5%. The equation can be used to provide guidance to engineering design of the proximity sensors.
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