Concepedia

A new cryopump with a very fast regeneration system

H-J Mundinger, H-U Häfner, M Mattern-Klosson, H. H. Klein, U. Timm

Vacuum · 1992 · 13 citations · 2 references

DOI

Concepts

References

2

Cryopumps for research and industry

Werner G. Baechler · Vacuum · 1987 · 19 citations

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Cryopumping

B.A. Hands · Vacuum · 1987 · 11 citations