<title>Miniature integrated optical sensors</title>

Abstract

Integrated optical transducers with on-chip measuring variables are shown to be suitable for realizing complete miniature sensor modules. Theoretical expressions are derived and discussed that can readily be used for the design of sensors based on converting the value of a measurand into the position of an on-chip integrated optical light pointer. The emphasis is on configurations based on tapered waveguides and chirped grating couplers. The viability of this approach is demonstrated by reporting first experimental results for a novel miniature refractometer chip.