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Niobium Josephson junctions with doped amorphous silicon barriers
29
Citations
6
References
1979
Year
SemiconductorsJosephson JunctionsElectrical EngineeringEngineeringSemiconductor DevicePhysicsJosephson DevicesNanoelectronicsNiobium Josephson JunctionsApplied PhysicsQuantum MaterialsSemiconductor MaterialSemiconductor Device FabricationThin FilmsSilicon On InsulatorMicroelectronicsRf SputteringJosephson Current Density
Nb-(a-Si)-Nb Josephson devices have been prepared by rf sputtering. The silicon films were deposited in an argon-hydrogen atmosphere. Such films can be activated as either n- or p-type semiconductors by the incorporation of phosphorus or boron, and the Fermi level of the material can be moved a considerable fraction of the bandgap. The Josephson current density of n-type layers is found to be substantially greater than p-type layers of the same thickness.
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