Ion Implantation and Annealing of Oxides - Concepedia

Concepedia

Publication | Open Access

Ion Implantation and Annealing of Oxides

DOI Full Paper Access

19

Citations

6

References

1986

Year

C. W. White, L. A. Boatner, P. S. Sklad, C.J. McHargue, S. J. Pennycook, Michael J. Aziz, G. C. Farlow, J. Rankin

MRS Proceedings

Materials ScienceMaterials EngineeringIon ImplantationEngineeringOxide ElectronicsApplied PhysicsIon Emission

References

	Year	Citations

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