Publication | Closed Access
Amorphous and nanocrystalline silicon made by varying deposition pressure in PECVD process
26
Citations
22
References
2009
Year
Materials ScienceEngineeringSilicon On InsulatorPecvd ProcessApplied PhysicsNanocrystalline SiliconAmorphous SolidChemical Vapor DepositionDeposition PressureThin Film Processing
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