A Matrix Addressable 1024 Element Blue Light Emitting InGaN QW Diode Array

Abstract

We have fabricated a 32 × 32 two-dimensional proof-of-concept array of individually matrix addressable blue InGaN MQW LEDs. Each 30 μm diameter element is equipped with its own integrated microlens, making these types programmable arrays potentially useful as sources for proximity microscopy with high parallel throughput such as in spatially resolved fluorescence spectroscopic imaging applications.