Effect of oxygen on the thermomechanical behavior of tantalum thin films during the β–α phase transformation

Abstract

Tantalum thin films were prepared in the metastable β phase, and their thermomechanical behaviors were investigated in situ in an ultrahigh vacuum environment. Controlled levels of oxygen were incorporated into the films either during deposition, by surface oxidation after deposition, or during thermomechanical testing. The transformation from the β phase to the stable α phase takes place in conjunction with a distinct increase in tensile stress. The thermomechanical behavior is strongly affected by the amount of oxygen to which the film is exposed and the method of exposure. Increasing oxygen content inhibits the phase transformation, requiring higher temperatures to reach completion. It is shown that the phase transformation takes place by a nucleation and growth process that is limited by growth. Changes in the activation energy for the phase transformation due to solute drag are estimated as a function of oxygen content and the mechanisms behind the stress evolution are elucidated.