Diamond Synthesis by the Microwave Plasma CVD Method Using a Mixture of Carbon Monoxide and Hydrogen Gas (I)

Abstract

Abstract The authors have succeeded in diamond synthesis by a microwave plasma chemical vapor deposition (plasma CVD) method using a mixture of CO and H2 gas, which had been thought to be difficult to achieve. The growth rate when using CO as the feedstock gas is about several times faster than that when using CH4.