Concepedia

Publication | Closed Access

Composition, structure and properties of SiN films fabricated by pulsed reactive closed-field unbalanced magnetron sputtering

DOI

17

Citations

35

References

2005

Year

Zh.Q. Yao, P. Yang, Nan Huang, Hong Sun, Guojiang Wan, Y.X. Leng, J.Y. Chen
Nuclear Instruments and Methods in Physics Research Section B Beam Interactions with Materials and Atoms

References

YearCitations

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