Dissociative scattering of fluorocarbon ions from a liquid surface at hyperthermal incident energies

Abstract

The dissociative scattering of CF+, CF2+ and CF3+ ions from a perfluoropolyether (PFPE) surface is explored across the hyperthermal incident energy range 50 to 220 eV. A comparative study on internal energy uptake efficacy and on translational energy transfer to the surface in scattering from the PFPE surface is presented. In addition, measurements are performed on C+ scattering in order to examine the energy transfer to the PFPE liquid surface in more detail. The CF3+ ions take up more internal energy as a function of translational energy transfer in the collision than the CF2+ and the CF+ ions. Furthermore, a detailed analysis and discussion is presented on the surface effective mass as a function of incident (fluoro)carbon ion mass. The analysis is based on elastic scattering from a single group. The results are remarkably different from ion/metal surface scattering.