Epitaxial LiTaO3 thin films by pulsed laser deposition

Abstract

Epitaxial LiTaO3 thin films having excellent crystalline properties have been achieved on (0001)-sapphire substrates using the technique of pulsed laser deposition. X-ray diffraction analysis revealed that completely single-phase c-oriented LiTaO3 films were produced. X-ray rocking curve analysis showed that the range of misalignment of the c-axis direction was about 0.2°. Ion channeling studies indicated a minimum backscattering yield of only 4.9%. Channeling also revealed an improvement in crystalline perfection as a function of distance above the interface with the sapphire substrate. Optical waveguiding with losses on the order of 1 dB/cm was demonstrated.