Mechanical characterization of low-k and barrier dielectric thin films - Concepedia

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Mechanical characterization of low-k and barrier dielectric thin films

29

Citations

14

References

2005

Year

N. Chérault, G. Carlotti, N. Casanova, Patrice Gergaud, Cindy Goldberg, M. Verdier

Microelectronic Engineering

Materials ScienceEngineeringApplied PhysicsMechanical CharacterizationThin FilmsElectrical PropertyThin Film ProcessingElectrical Insulation

References

	Year	Citations

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