Structural modifications and temperature stability of silicon incorporated diamond-like a-C:H films - Concepedia

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Structural modifications and temperature stability of silicon incorporated diamond-like a-C:H films

44

Citations

8

References

1998

Year

S.S. Camargo, Raphael Santos, A.L. Baia Neto, R. Carius, F. Finger

Thin Solid Films

Materials EngineeringMaterials ScienceDiamond-like CarbonEngineeringApplied PhysicsSemiconductor Device FabricationStructural ModificationsTemperature StabilityH FilmsChemical Vapor DepositionSilicon On InsulatorThin Film Processing

References

	Year	Citations

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