Publication | Closed Access
Thermal stability of silicon nitride coatings produced by ion assisted deposition
15
Citations
7
References
1989
Year
Materials ScienceThermal Spray CoatingEngineeringThermal Barrier CoatingSurface ScienceApplied PhysicsElectronic PackagingSilicon Nitride CoatingsThermal StabilityChemical Vapor DepositionSurface Processing
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