Verbesserung der Auflösung im Elekronenmikroskop durch Bildebenen‐Holographie

Abstract

Abstract Enhancement of resolution in electron microscopy can be achieved by use of electron image holography. In order to compensate for the aberrations of the electron lenses the reconstruction is performed with laser light in an optical system with suitably adapted aberrations. The partial coherence in connection with the aberrations of the electron lenses limits the possible resolution. The limits of resolution dependent on defocusing and spherical aberration are calculated.