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Effect of substrate preparation and deposition conditions on the preferred orientation of TiN coatings deposited by RF reactive sputtering

Materials ScienceMaterials EngineeringRf Reactive SputteringEngineeringPreferred OrientationCorrosionAntennaApplied PhysicsSurface ScienceMulti-functional CoatingTin CoatingsSurface ProcessingDepth-graded Multilayer Coating