Determination of strain distributions in ion-implanted magnetic bubble garnets applying x-ray dynamical theory

Abstract

X-ray dynamical theory has been applied to determine strain distributions caused by ion implantation into magnetic bubble garnets. Experimental rocking curves obtained by a double-crystal x-ray diffractometer were compared with theoretical curves for assumed strain distributions, and after several trials, good fittings were obtained. It is shown that slight change in the assumed strain distribution leads to appreciable change in the theoretical rocking curve. Comparison between dynamical and kinematical treatments shows that dynamical treatment is more accurate. Applying the method, it was confirmed that strain by multiple ion implantation was basically the sum of those by single ion implantation.