Concepedia

Publication | Closed Access

EUV interferometric lithography and structural characterization of an EUV diffraction grating with nondestructive spectroscopic ellipsometry

DOI

14

Citations

4

References

2011

Year

Chun-Hung Lin, Chi-Hao Fong, Yi-Ming Lin, Yin‐Yu Lee, Hok‐Sum Fung, Bor‐Yuan Shew, Jiann Shieh
Microelectronic Engineering

References

YearCitations

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