Design and dynamic evaluation for a linear ultrasonic stage using the thin-disc structure actuator - Concepedia

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Design and dynamic evaluation for a linear ultrasonic stage using the thin-disc structure actuator

10

Citations

7

References

2007

Year

Fuh-Liang Wen, C.Y. Yen

EngineeringSoft RoboticsLinear Ultrasonic StagePower UltrasoundMechanical EngineeringMechatronicsMechanical SystemsActive Vibration ControlActuationDynamic EvaluationUltrasoundVibration ControlThin-disc Structure ActuatorMicromachined Ultrasonic Transducer

References

	Year	Citations

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