Concepedia

Publication | Open Access

Ti3SiC2-formation during Ti–C–Si multilayer deposition by magnetron sputtering at 650 °C

DOIFull Paper Access

54

Citations

20

References

2013

Year

Vladimir Vishnyakov, Jun Lu, Per Eklund, Lars Hultman, J.S. Colligon
Vacuum

References

YearCitations

Page 1