Role of process parameters in the texture evolution of TiN films deposited by hollow cathode discharge ion plating - Concepedia

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Role of process parameters in the texture evolution of TiN films deposited by hollow cathode discharge ion plating

33

Citations

23

References

2001

Year

Y.M Chen, G.P. Yu, Jia‐Hong Huang

Surface and Coatings Technology

Materials ScienceTin FilmsEngineeringProcess ParametersApplied PhysicsChemical DepositionChemical Vapor DepositionPlasma ProcessingTexture EvolutionThin Film Processing

References

	Year	Citations

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