(hfac)Cu(I)(MP) (hfac=hexafluoroacetylacetonate, MP=4-methyl-1-pentene) and (hfac)Cu(I)(DMB) (DMB=3,3-dimethyl-1-butene) for the chemical vapor deposition of copper film - Concepedia

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(hfac)Cu(I)(MP) (hfac=hexafluoroacetylacetonate, MP=4-methyl-1-pentene) and (hfac)Cu(I)(DMB) (DMB=3,3-dimethyl-1-butene) for the chemical vapor deposition of copper film

21

Citations

5

References

1999

Year

Sang‐Woo Kang, Sang‐Ho Han, Shi‐Woo Rhee

Thin Solid Films

Materials ScienceChemical EngineeringCopper Oxide MaterialsEngineeringCopper FilmSurface ScienceChemistryChemical DepositionChemical Vapor DepositionThin Film Processing

References

	Year	Citations

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