Development of a grating based multi-degree-of-freedom laser linear encoder using diffracted light

Determination and correction of quadrature fringe measurement errors in interferometers

Peter L. M. Heydemann · Applied Optics · 1981 · 420 citations

Engineering, Astronomy, Metrology +14

Development of a laser-based high-precision six-degrees-of-freedom motion errors measuring system for linear stage

Chien‐Hung Liu, Wen‐Yuh Jywe, Cheng-Chung Hsu · Review of Scientific Instruments · 2005 · 81 citations

Engineering, Manufacturing Engineering, Instrumentation +16

Metrological errors in optical encoders

Luis Miguel Sanchez‐Brea, Tomás Morlanes · Measurement Science and Technology · 2008 · 81 citations

Engineering, Electrical Engineering, Mechatronics Engineering +17

A Multi-Degree-of-Freedom Measuring System for CMM Geometric Errors

Jun Ni, Pengfei Huang, S. M. Wu · Journal of Engineering for Industry · 1992 · 68 citations

Engineering, Mechatronics Engineering, Geodesy +16

Simple, real-time method for removing the cyclic error of a homodyne interferometer with a quadrature detector system

Taeho Keem, Satoshi Gonda, Ichiko Misumi et al. · Applied Optics · 2005 · 63 citations

Engineering, Physics, Optics +15