The critical influence of surface topography on nanoindentation measurements of a-SiC:H films - Concepedia

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The critical influence of surface topography on nanoindentation measurements of a-SiC:H films

24

Citations

23

References

2014

Year

Vladimír Čech, Tomáš Lasota, Erik Pálesch, Jaroslav Lukeš

Surface and Coatings Technology

Materials ScienceSurface CharacterizationEngineeringNanotechnologySurface ScienceApplied PhysicsCritical InfluenceH FilmsSemiconductor Device FabricationThin FilmsSurface TopographyThin Film ProcessingCarbide

References

	Year	Citations

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