Concepedia

Publication | Closed Access

Dynamics of pulsed reactive RF discharges in response to thin film deposition

DOI

17

Citations

32

References

2014

Year

B Sikimić, Ilija Stefanović, I. Denysenko, J. Winter, N. Sadeghi
Plasma Sources Science and Technology

Abstract

International audience

References

YearCitations

Page 1