Concepedia

Publication | Closed Access

Investigation of the effects of bottom anti-reflective coating on nanoscale patterns by laser interference lithography

DOI

11

Citations

11

References

2011

Year

Eun‐Mi Park, Jinnil Choi, Byung Hyun Kang, Ki-Young Dong, Yun-Kwon Park, In Sang Song, Byeong‐Kwon Ju
Thin Solid Films

References

YearCitations

Page 1