Concepedia

Effects of the Ta content on the microstructure and electrical property of reactively sputtered TaxZr1−xN thin films

Jian-Long Ruan, Jow-Lay Huang, Horng‐Hwa Lu, Jen‐Sue Chen, Ding‐Fwu Lii

Thin Solid Films · 2011 · 14 citations · 29 references

DOI

Concepts

References

29

Introduction to Solid State Physics

C. Kittel, Heng Fan · American Journal of Physics · 1957 · 22.4K citations

, , +13

Introduction to solid state physics

Journal of the Franklin Institute · 1956 · 7.2K citations

, , +13

X-ray diffraction procedures

Harold P. Klug, Leroy Alexander · CERN Document Server (European Organization for Nuclear Research) · 1954 · 4.2K citations

Metallurgical Thermochemistry.

J. A. Charles · Chemical Engineering Science · 1980 · 1.6K citations

Thermal stability of nitride thin films

Lars Hultman · Vacuum · 2000 · 627 citations

, , +12