Frequency-resolved temperature imaging of integrated circuits with full field heterodyne interferometry

Abstract

We report a fast imaging method based on full field heterodyne interferometry for the purpose of frequency resolved temperature imaging. An integrated circuit is supplied with a modulated current resulting into a temperature modulation. The frequency content for this modulation is detected using an object beam and a reference beam, frequency-shifted to create a beating of the interference pattern. We obtain frequency domain spectra of the temperature with excellent precision.