Publication | Closed Access
Properties of carbon films with a dose of titanium or zirconium prepared by magnetron sputtering
17
Citations
4
References
2004
Year
Materials ScienceMaterials EngineeringCarbon FilmsEngineeringGlassy CarbonCarbon-based MaterialApplied PhysicsMagnetron SputteringThin FilmsChemical DepositionCarbon-based FilmsThin Film Processing
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