Superconducting Bi-Sr-Ca-Cu-O films by magnetron sputtering of single Bi2O3-SrF2-CaF2-CuO targets

M. Levinson, S. S. Shah, Nobuhiro Naito

Applied Physics Letters · 1988 · 16 citations · 9 references

Concepts

Abstract

Superconducting Bi-Sr-Ca-Cu-O films have been fabricated by rf magnetron sputtering using single mixed Bi2O3-SrF2-CaF2-CuO targets. Uniform, reproducible films were formed on SrTiO3 substrates with zero resistance as high as 78 K. Grain morphology and orientation were affected by annealing temperature and the F content of the films. The final films showed excellent environmental and mechanical stability.

References

9