Publication | Closed Access
The influence of N2 partial pressure and substrate bias on electron density and temperature in a dc sputtering diode
12
Citations
9
References
1987
Year
Electron DensityElectrical EngineeringEngineeringPhysicsSubstrate BiasNanoelectronicsN2 Partial PressureBias Temperature InstabilityApplied PhysicsVacuum DeviceMicroelectronicsSemiconductor Device
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