Phase Control of Bi-Sr-Ca-Cu-O Thin Films Prepared by Coevaporation with RF Oxygen Plasma

Abstract

Thin films of Bi-Sr-Ca-Cu-O were prepared on (100)SrTiO 3 substrates by coevaporation with rf oxygen plasma. It has been confirmed that the structural phases of films can be controlled mainly by the flux density of activated oxygen and the substrate temperature, and not by the chemical compositions of the films. Thin films in the Bi 2 (Sr, Ca) 3 Cu 2 O y phase and the Bi 2 (Sr, Ca) 2 CuO y phase were prepared by changing the flux density of activated oxygen and the substrate temperature. The films in the Bi 2 (Sr, Ca) 3 Cu 2 O y phase showed superconducting transitions at 35 K.