Efficient Chemical Sensing by Coupled Slot SOI Waveguides

Abstract

A guided-wave chemical sensor for the detection of environmental pollutants or biochemical substances has been designed. The sensor is based on an asymmetric directional coupler employing slot optical waveguides. The use of a nanometer guiding structure where optical mode is confined in a low-index region permits a very compact sensor (device area about 1200 μm(2)) to be realized, having the minimum detectable refractive index change as low as 10(-5). Silicon-on-Insulator technology has been assumed in sensor design and a very accurate modelling procedure based on Finite Element Method and Coupled Mode Theory has been pointed out. Sensor design and optimization have allowed a very good trade-off between device length and sensitivity. Expected device sensitivity to glucose concentration change in an aqueous solution is of the order of 0.1 g/L.