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Effect of an in situ hydrogen plasma pre-treatment on the reduction of GaSb native oxides prior to atomic layer deposition

Chemical EngineeringGaseous ReductionEngineeringSurface ScienceApplied PhysicsLayer DepositionSitu HydrogenGasb Native OxidesChemical Vapor DepositionHydrogenChemistryChemical DepositionPlasma Processing