Cu films deposition by dielectric barrier discharge in supercritical CO2, Ar and Xe environments

The barrier discharge: basic properties and applications to surface treatment

H-E Wagner, Ronny Brandenburg, K. V. Kozlov et al. · Vacuum · 2003 · 756 citations

Natural Sciences, Materials Engineering, Materials Science +14

Deposition of Conformal Copper and Nickel Films from Supercritical Carbon Dioxide

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Engineering, Materials Engineering, Materials Science +17

Recent Developments in Materials Synthesis and Processing Using Supercritical CO2

Andrew I. Cooper · Advanced Materials · 2001 · 158 citations

Natural Sciences, Materials Engineering, Materials Science +14

A principled stance

Martyn Poliakoff, Paul T. Anastas · Nature · 2001 · 134 citations

Supercritical Fluid Synthesis of Metal and Semiconductor Nanomaterials

Justin D. Holmes, Daniel Mark Lyons, Kirk J. Ziegler · Chemistry - A European Journal · 2003 · 101 citations

Natural Sciences, Materials Engineering, Materials Science +17