Particle-in-Cell Simulation of Plasma Sheath Dynamics With Kinetic Ions

Abstract

An electrostatic particle-in-cell simulation code is developed to investigate the interaction between plasma and material surfaces in the presence of secondary electron emission. Kinetic ions are included into the numerical simulation to incorporate the process of ion bombardment on the material surfaces. The influences of the secondary electron emission on sheath dynamics are further investigated, which is induced by ions on top of electrons.