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Deposition of diamond-like carbon films on aluminium substrates by RF-PECVD technique: Influence of process parameters

Materials EngineeringMaterials ScienceDiamond-like CarbonEngineeringNanoelectronicsApplied PhysicsRf-pecvd TechniqueAluminium SubstratesChemical DepositionDiamond-like Carbon FilmsChemical Vapor Deposition